Opening book details…
About this Engineering article
A Simple Technique for Silicon Nitride Growth by Hackleman, David is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hackleman, David
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 1978
- Language
- EN
- Field
- Engineering (Physical Sciences)