About this Materials Science article
Application of High Frequency Short-pulsed Negative Biasing for the Decreasing of Macroparticle Content on Substrate Immersed in Vacuum Arc Plasma by Ryabchikov, A.I.; Sivin, D.O.; Bumagina, A.I. is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Ryabchikov, A.I.; Sivin, D.O.; Bumagina, A.I.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2014
- Language
- EN
- Field
- Materials Science (Physical Sciences)