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About this Chemistry article

Vapor Phase Fluorination of Silica Surface with Chlorofluoromethanes and CF 4 by Okazaki, Susumu; Kurosaki, Akito is a Chemistry article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Chemistry.

Author
Okazaki, Susumu; Kurosaki, Akito
Publisher
Chemical Society of Japan; The Chemical Society of Japan; Chemical Society of Japan/Nippon Kagakukai (ISSN 0009-2673)
Published
1987
Field
Chemistry (Physical Sciences)

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