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About this book
Surface species during ALD of platinum observed with in situ reflection IR spectroscopy by Michiel Van Daele & Christophe Detavernier & Jolien Dendooven is a book available to read on EtoBox.
- Author
- Michiel Van Daele & Christophe Detavernier & Jolien Dendooven
- Publisher
- Royal Society of Chemistry
- Language
- EN
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