About this scholarly article

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optomechanics 2003 - Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution by Han, Yufeng; Wong, Thomas; Shu, Deming; Hatheway, Alson E. is a scholarly article available to read on EtoBox.

Author

Han, Yufeng; Wong, Thomas; Shu, Deming; Hatheway, Alson E.

Publisher

SPIE

Published

2003

Language

EN