Opening book details…
About this Engineering article
Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production by T. Maruyama; Y. Machida; S. Sugatani; H. Tsuchikawa; H. Hoshino; M. Ito; H. Tago; L. L. Chau; S. Lee; H. Komami is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T. Maruyama; Y. Machida; S. Sugatani; H. Tsuchikawa; H. Hoshino; M. Ito; H. Tago; L. L. Chau; S. Lee; H. Komami
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2009
- Field
- Engineering (Physical Sciences)