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About this Engineering article
Mechanical Masking of Films Deposited by Atomic Layer Deposition by Langston, Michael C.; Usui, Takane; Prinz, Fritz B. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Langston, Michael C.; Usui, Takane; Prinz, Fritz B.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)
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