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Dielectric and structural properties of thin SrHfO3 layers on TiN by Lupina, G.; Kozłowski, G.; Dabrowski, J.; Dudek, P.; Lippert, G.; Müssig, H.-J. is a Engineering article available to read on EtoBox.

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Author
Lupina, G.; Kozłowski, G.; Dabrowski, J.; Dudek, P.; Lippert, G.; Müssig, H.-J.
Publisher
American Institute of Physics; AIP Publishing (ISSN 0003-6951)
Published
2008
Field
Engineering (Physical Sciences)

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