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About this Physics and Astronomy article
Effect of Radical Species Density and Ion Bombardment During Ashing of Extreme Ultralow-κ Interlevel Dielectric Materials by Worsley, M. A.; Bent, S. F.; Fuller, N. C. M.; Tai, T. L.; Doyle, J.; Rothwell, M.; Dalton, T. is a Physics and Astronomy article available to read on EtoBox.
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- Author
- Worsley, M. A.; Bent, S. F.; Fuller, N. C. M.; Tai, T. L.; Doyle, J.; Rothwell, M.; Dalton, T.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 2007
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)