About this scholarly article

SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] Emerging Digital Micromirror Device Based Systems and Applications VII - 3D microscopy for microfabrication quality control by Douglass, Michael R.; King, Philip S.; Lee, Benjamin L.; Muller, Matthew S.; De Jean, Paul D. is a scholarly article available to read on EtoBox.

Author

Douglass, Michael R.; King, Philip S.; Lee, Benjamin L.; Muller, Matthew S.; De Jean, Paul D.

Publisher

SPIE

Published

2015