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About this Engineering article
A Method of Correcting the Distorted Spot Shape of a Deflected Electron Probe by Means of Dynamic Focusing and Stigmator by Kanaya, K; Baba, N is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kanaya, K; Baba, N
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics and the Physical Society (ISSN 0022-3735)
- Published
- 1980
- Language
- EN
- Field
- Engineering (Physical Sciences)