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What is Transmission and Analytical Electron Microscopy about?

## Abstract Transmission electron microscopy provides information on all aspects of the microstructure — structural, atomic, chemical, electronic, magnetic, etc. — at the highest spatial resolution in physical and biological materials, with applications ranging from fundamental studies to process metrology in the semiconductor industry. Developments in correcting electron-optical aberrations have improved TEM resolution to sub-Å levels. Coherent Bragg scattering (diffraction), incoherent Rutherford scattering (atomic mass), and interference (phase) are some contrast mechanisms in TEM. For phase contrast, optimum imaging is observed at the Scherzer defocus. Magnetic domains are imaged in Fresnel, Foucault, or differential phase contrast (DPC) modes. Off-axis electron holography measures phase shifts of the electron wave, and is affected by magnetic and electrostatic fields of the specimen. In scanning-transmission (STEM) mode, a focused electron beam is scanned across the specimen to sequentially form an image; a high-angle annular dark field detector gives Z-contrast images with elemental specificity and atomic resolution. Series of (S)TEM images, recorded every one or two degrees

Author

Kannan M. Krishnan

Publisher

Oxford University PressOxford

Published

2021

Language

EN

ISBN

9780192566089

Subjects

Science, Chemistry, Engineering