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This document summarizes a 2004 IEEE conference paper on dynamic finite element modeling of multiple capacitive micromachined ultrasonic transducer (cMUT) cells in immersion. 1) A finite element model was developed to simulate cMUT cells operating in both conventional and collapsed regimes. The model included the silicon membrane, oxide posts, insulation layer, substrate, and surrounding fluid. 2) Simulations showed that collapsed operation generated over 6 times greater acoustic output pressure than conv

Author

فهد انا

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EN