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Comparative Study of SIMOX Structures Using Four Analytical Techniques by Fukarek, W.; Yankov, R. A.; Skorupa, W. is a Engineering article available to read on EtoBox.
What is Comparative Study of SIMOX Structures Using Four Analytical Techniques about?
Four analytical techniques have been employed to characterize 'Separation by Implanted Oxygen' (SIMOX) structures of both poor and good quality with the aim of determining the application limits of the techniques used. Rutherford backscattering spectrometry in conjunction with channelling (RBS/C) of 1.5 MeV He+ ions and crosssectional transmission electron microscopy (XTEM) have been utilized to evaluate the samples. The two optical techniques that have been used are polarized infrared reflection (PIRR) in the range of 800-7000 cm-' and variable-angle spectroscopic ellipsometry (VASE) over the wavelength range 250-1700 nm. The combination of these two optical techniques by simultaneously evaluating all the experimental data on the basis of one optical multilayer model is reported. The optical multilayer models as well as the correction of PIRR data are discussed in detail. Good agreement of the layer thicknesses evaluated by the optical techniques and RBS has been found. While silicon islands within the buried oxide can only be qualitatively detected by RBS, VASE can provide more detailed information on the SIMOX structures. Cross-sectional T E M is a complementary tecbnique to RBS
Who reads Comparative Study of SIMOX Structures Using Four Analytical Techniques?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Fukarek, W.; Yankov, R. A.; Skorupa, W.
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley; Research Square (ISSN 0142-2421)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)