About this Engineering article
Focused Ion Beam Optical Column Design and Consideration on Minimum Attainable Beam Size by K. Sakaguchi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- K. Sakaguchi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)