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About this Engineering article

Focused Ion Beam Optical Column Design and Consideration on Minimum Attainable Beam Size by K. Sakaguchi is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
K. Sakaguchi
Publisher
AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
Published
1998
Language
EN
Field
Engineering (Physical Sciences)