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What is Anisotropic and Isotropic Silicon Etching about?

This document discusses wet-chemical etching of silicon, including: 1) Anisotropic silicon etching uses strong alkaline solutions like KOH or TMAH that etch silicon differently based on crystal plane orientation, allowing for precise 3D structures. 2) Isotropic etching uses mixtures like HF/HNO3 that etch uniformly in all directions. This allows etching of silicon and silicon dioxide via oxidation and dissolution reactions. 3) The company provides an isotropic silicon etchant called AFN 549 and other e

Author

Koko2007

Language

EN