About this scholarly article

2008 IEEE International Reliability Physics Symposium - Comprehensive reliability analysis of CoWP Metal Cap unit processes for high volume production in sub-μm dimensions by Aubel, O.; Thierbach, S.; Seidel, R.; Freudenberg, B.; Meyer, M.A.; Feustel, F.; Poppe, J.; Nopper, M.; Preusse, A.; Zistl, C.; Weide-Zaage, K. is a scholarly article available to read on EtoBox.

Author

Aubel, O.; Thierbach, S.; Seidel, R.; Freudenberg, B.; Meyer, M.A.; Feustel, F.; Poppe, J.; Nopper, M.; Preusse, A.; Zistl, C.; Weide-Zaage, K.

Publisher

IEEE

Published

2008

Language

EN