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About this Engineering article
Capacitive sensors in CMOS technology with polymer coating by C. Cornila; A. Hierlemann; R. Lenggenhager; P. Malcovati; H. Baltes; G. Noetzel; U. Weimar; W. Go ̈pel is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. Cornila; A. Hierlemann; R. Lenggenhager; P. Malcovati; H. Baltes; G. Noetzel; U. Weimar; W. Go ̈pel
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-4005)
- Published
- 1995
- Language
- EN
- Field
- Engineering (Physical Sciences)