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What is Chemisorption in Atomic Layer Deposition about?

The document discusses chemisorption mechanisms in atomic layer deposition (ALD), highlighting the differences between chemisorption and physisorption. It details various ligand exchange mechanisms, including proton-mediated reactions, halogen abstraction, and transmetalation, as well as dissociation mechanisms like dissociative chemisorption and substitution. Additionally, it covers other mechanisms such as association, insertion, and oxidation/combustion in the context of ALD processes.

Author

N. Tu

Language

EN