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About this Earth and Planetary Sciences article
Improvement of Silicon Etching Resolution Using the Confined Etchant Layer Technique by Yanbing Zu; Lei Xie; Zhaowu Tian; Zhaoxiong Xie; Jiqian Mu; Bingwei Mao is a Earth and Planetary Sciences article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Earth and Planetary Sciences.
- Author
- Yanbing Zu; Lei Xie; Zhaowu Tian; Zhaoxiong Xie; Jiqian Mu; Bingwei Mao
- Publisher
- Springer; Springer-Verlag; Zhongguo Kexue Zazhishe/Science in China Press; [Heidelberg]; [Beijing]; [Berlin]: Science Press; Springer; Springer Science and Business Media LLC; Science China Press., Co. Ltd. (ISSN 1001-6538)
- Published
- 1997
- Language
- EN
- Field
- Earth and Planetary Sciences (Physical Sciences)
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