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About this Engineering article

Analysis of Structure and Defects in Thin Silicon Films Deposited from Hydrogen Diluted Silane by G. van Elzakker; V. Nádaždy; F.D. Tichelaar; J.W. Metselaar; M. Zeman is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
G. van Elzakker; V. Nádaždy; F.D. Tichelaar; J.W. Metselaar; M. Zeman
Publisher
Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
Published
2006
Field
Engineering (Physical Sciences)

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