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About this Engineering article
Analysis of Structure and Defects in Thin Silicon Films Deposited from Hydrogen Diluted Silane by G. van Elzakker; V. Nádaždy; F.D. Tichelaar; J.W. Metselaar; M. Zeman is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- G. van Elzakker; V. Nádaždy; F.D. Tichelaar; J.W. Metselaar; M. Zeman
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2006
- Field
- Engineering (Physical Sciences)
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