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About this Materials Science article
Interdigitated 50 nm Ti electrode arrays fabricated using XeF 2 enhanced focused ion beam etching by Santschi, Ch; Jenke, M; Hoffmann, P; Brugger, J is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Santschi, Ch; Jenke, M; Hoffmann, P; Brugger, J
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0957-4484)
- Published
- 2006
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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