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About this Engineering article
Numerical Investigation of Plasma Recovery in Plasma Source Ion Implantation by Kyoung-Jae Chung; Jae-Myung Choe; Gon-Ho Kim; Y.S. Hwang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kyoung-Jae Chung; Jae-Myung Choe; Gon-Ho Kim; Y.S. Hwang
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)
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