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This document provides information about the ECE 693-001 course "Foundations of MEMS Technology" being offered in the fall semester of 2003. The course will be held on Mondays and Wednesdays from 11:00-12:15 PM in room 204 of the Bevill Research Center. It will be taught by Dr. R.K. Pandey and is worth 3 credits. The course objectives are to gain insight into MEMS technology and its applications, understand MEMS materials and device operation principles, and learn MEMS fabrication techniques. Topics to be d

Author

Mukesh Parmar

Language

EN