About this scholarly article

Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Residual stress in thin-film parylene-c by Harder, T.A.; Tze-Jung Yao, ; Qing He, ; Chi-Yuan Shih, ; Yu-Chong Tai, is a scholarly article available to read on EtoBox.

Author

Harder, T.A.; Tze-Jung Yao, ; Qing He, ; Chi-Yuan Shih, ; Yu-Chong Tai,

Publisher

IEEE

Published

2002