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About this Engineering article
Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by lon-beam-assisted Deposition. by HAYASHI, Toshiyuki; MATSUMURO, Akihito; WATANABE, Tomohiko; MORI, Toshihiko; TAKAHASHI, Yutaka; YAMAGUCHI, Katsumi is a Engineering article available to read on EtoBox.
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- Author
- HAYASHI, Toshiyuki; MATSUMURO, Akihito; WATANABE, Tomohiko; MORI, Toshihiko; TAKAHASHI, Yutaka; YAMAGUCHI, Katsumi
- Publisher
- The Japan Society of Mechanical Engineers; Japan Society of Mechanical Engineers/Nihon Kikai Gakkai; Japan Society of Mechanical Engineers (ISSN 0387-5008)
- Published
- 1999
- Field
- Engineering (Physical Sciences)