Can I read Modelling Of Microfabrication Systems (microtechnology And Mems) on EtoBox?

Modelling Of Microfabrication Systems (microtechnology And Mems) by Prof. Raja Nassar, Prof. Weizhong Dai (auth.) is a nonfiction available to read on EtoBox.

What is Modelling Of Microfabrication Systems (microtechnology And Mems) about?

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

Who reads Modelling Of Microfabrication Systems (microtechnology And Mems)?

Author

Prof. Raja Nassar, Prof. Weizhong Dai (auth.)

Publisher

Springer-Verlag Berlin Heidelberg

Published

2003

Language

EN

ISBN

9783642055362

Category

nonfiction

Subjects

Mathematics, Engineering, Computer Science