About this scholarly article

2013 13th International Conference on Control, Automation and Systems (ICCAS 2013) - Methods and properties of quadratic iterative learning control for semi-conductor processes under different perturbations by Kim, Huiyong; Park, Jun Hyung; Lee, Kwang Soon is a scholarly article available to read on EtoBox.

Author

Kim, Huiyong; Park, Jun Hyung; Lee, Kwang Soon

Publisher

IEEE

Published

2013

Language

EN