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About this Engineering article
Improvement in the Crystalline Quality of Homoepitaxial Diamond Films by Oxygen Plasma Etching of Mirror-polished Diamond Substrates by Michinori Yamamoto; Tokuyuki Teraji; Toshimichi Ito is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Michinori Yamamoto; Tokuyuki Teraji; Toshimichi Ito
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)