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About this Engineering article
Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry : Leng, J.M.; Sidorowich, JJ.; Yoon, Y.D.; Opsal, Y.D.; Lee, B.H.; Cha, G.; Moon, J.; Lee, S.I. Journal of Applied Physics, Vol. 81, No. 8, pp. 3570–3578 (1997) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0963-8695)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)