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Dependence of the AES backscattering correction factor on the experimental configuration by A. Jablonski; C.J. Powell is a Physics and Astronomy article available to read on EtoBox.
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We present an analysis of the dependence of the backscattering correction factor (BCF) in Auger-electron spectroscopy (AES) on the analyzer acceptance angle. Illustrative BCF calculations are presented for Pd M 5 N 45 N 45 Auger electrons as a function of primary-electron energy for primary-electron angles of incidence, θ 0 , of 0°and 80°and for various values of the analyzer acceptance angle. It was necessary to generalize the BCF definition for the case of an analyzer with an arbitrarily large acceptance angle; this was done with a new function, the integral emission depth distribution function. BCFs calculated from an advanced model of electron transport in the surface region of the Pd sample varied weakly with analyzer half-cone angle for θ 0 = 0°but more strongly for θ 0 = 80°where there were BCF differences varying between 19% at a primary energy of 1 keV and 6% at a primary energy of 5 keV. These BCF differences are due in part to variations of the BCF with emission angle and in part to variations of the density of inner-shell ionizations within the information depth for the detected Auger electrons. The latter variations are responsible for differences larger than 10% betwe
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- Author
- A. Jablonski; C.J. Powell
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0039-6028)
- Published
- 2010
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)