Opening book details…
About this Engineering article
Low-Temperature Floating Plasma Oxidation of Poly-SiGe by Fan, Zhineng; Zhao, Gang; Chu, Paul K.; Jin, Zhonghe; Kwok, Hoi S.; Wong, Man is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Fan, Zhineng; Zhao, Gang; Chu, Paul K.; Jin, Zhonghe; Kwok, Hoi S.; Wong, Man
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)