Can I read Oxide charge measurements in EEPROM devices on EtoBox?

Oxide charge measurements in EEPROM devices by C. De Nardi; R. Desplats; P. Perdu; F.Beaudoin; J.-L. Gauffier is a Engineering article available to read on EtoBox.

What is Oxide charge measurements in EEPROM devices about?

A method to measure "on site" programmed charges in EEPROM devices is presented. Electrical AFM based techniques (Electric Force Microscopy (EFM) and Scanning Kelvin Probe Microscopy (SKPM)) are used to probe directly floating gate potentials. Both preparation and probing methods are discussed. Sample preparation to access floating gate/oxide interfaces at a few nanometers distance without discharging the data reveals to be the key point, more than the probing technique itself.

Who reads Oxide charge measurements in EEPROM devices?

Author

C. De Nardi; R. Desplats; P. Perdu; F.Beaudoin; J.-L. Gauffier

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)

Published

2005

Language

EN

Field

Engineering (Physical Sciences)