About this scholarly article

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Annealing impact on damascene Cu resistivity and microstructures by Qing-Tang Jiang, ; Ming-Hsing Tsai, ; Frank, A.; Parihar, V.; Nowell, M.; Augur, R.A.; Havemann, R.H.; Luttmer, J.D. is a scholarly article available to read on EtoBox.

Author

Qing-Tang Jiang, ; Ming-Hsing Tsai, ; Frank, A.; Parihar, V.; Nowell, M.; Augur, R.A.; Havemann, R.H.; Luttmer, J.D.

Publisher

IEEE

Published

2001