About this scholarly article

SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Russian standards for dimensional measurements for nanotechnologies by Gavrilenko, V. P.; Postek, Michael T.; Newbury, Dale E.; Filippov, M. N.; Novikov, Yu. A.; Platek, S. Frank; Joy, David C.; Rakov, A. V.; Todua, P. A. is a scholarly article available to read on EtoBox.

Author

Gavrilenko, V. P.; Postek, Michael T.; Newbury, Dale E.; Filippov, M. N.; Novikov, Yu. A.; Platek, S. Frank; Joy, David C.; Rakov, A. V.; Todua, P. A.

Publisher

SPIE

Published

2009

Language

EN