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About this Engineering article
Properties of an Internal U-Shaped Inductively Coupled Plasma Source Operated by Superimposed Dual Frequency by Kim, Do Han; Kim, Tae Hyung; Lee, Soo Jung; Lee, Won Oh; Kim, Kyong Nam; Yeom, Geun Young is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, Do Han; Kim, Tae Hyung; Lee, Soo Jung; Lee, Won Oh; Kim, Kyong Nam; Yeom, Geun Young
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0093-3813)
- Published
- 2018
- Language
- EN
- Field
- Engineering (Physical Sciences)