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About this Engineering article
Detection and Mapping of Oxygen in Silicon Wafers by Scanning Infrared Absorption by Philippe Torchio; Roland Occelli is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Philippe Torchio; Roland Occelli
- Publisher
- Springer; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC (ISSN 0195-9271)
- Published
- 1997
- Language
- EN
- Field
- Engineering (Physical Sciences)