Can I read Database Needs for Modeling and Simulation of Plasma Processing (The compass series) on EtoBox?

Database Needs for Modeling and Simulation of Plasma Processing (The compass series) by Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council is a nonfiction available to read on EtoBox.

What is Database Needs for Modeling and Simulation of Plasma Processing (The compass series) about?

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition

Who reads Database Needs for Modeling and Simulation of Plasma Processing (The compass series)?

Author

Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council

Publisher

National Academies Press

Published

1996

Language

EN

ISBN

9780309573535

Category

nonfiction

Subjects

Engineering, Science, Astronomy