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About this Engineering article
Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps by Vallat, Rémi; Gassilloud, Rémy; Eychenne, Brice; Vallée, Christophe is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Vallat, Rémi; Gassilloud, Rémy; Eychenne, Brice; Vallée, Christophe
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2017
- Field
- Engineering (Physical Sciences)
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