About this scholarly article

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy by Hafiane, Adel; Gorecki, Christophe; Petitgrand, Sylvain; Gigan, Olivier; Bouchafa, Samia; Bosseboeuf, Alain is a scholarly article available to read on EtoBox.

Author

Hafiane, Adel; Gorecki, Christophe; Petitgrand, Sylvain; Gigan, Olivier; Bouchafa, Samia; Bosseboeuf, Alain

Publisher

SPIE

Published

2003