About this scholarly article

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Finite Element-Based Analysis of Single-Crystal Si Contour-Mode Electromechanical RF Resonators by Maxey, C.; Raman, S. is a scholarly article available to read on EtoBox.

Author

Maxey, C.; Raman, S.

Publisher

IEEE

Published

2004

Language

EN