About this scholarly article

2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - High Quality Factor PMUTs with Optimized Thermo-Elastic Dissipation through Etching Holes by Chen, Xuying; Liu, Xinxin; Wang, Tao; Le, Xianhao; Xu, Zhonggui; Lee, Chengkuo; Xie, Jin is a scholarly article available to read on EtoBox.

Author

Chen, Xuying; Liu, Xinxin; Wang, Tao; Le, Xianhao; Xu, Zhonggui; Lee, Chengkuo; Xie, Jin

Publisher

IEEE

Published

2018