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About this Engineering article
Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching by Kato, N. I.; Kohno, Y.; Saka, H. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kato, N. I.; Kohno, Y.; Saka, H.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)