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Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device by Grasser, L.; Mathias, H.; Parrain, F.; Roux, X. Le; Gilles, J. -P. is a scholarly article available to read on EtoBox.

What is Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device about?

Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.

Author

Grasser, L.; Mathias, H.; Parrain, F.; Roux, X. Le; Gilles, J. -P.

Published

2008

Language

EN