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Can I read The Fabrcation of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples on EtoBox?
The Fabrcation of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples by Jian-Gang Zhang; Shan-Hong Xia; Shao-Feng Chen is a Mathematics article available to read on EtoBox.
What is The Fabrcation of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples about?
The large area LPCVD Si 3 N 4 membrane mounted with NiCr/Ni thermocouples is the key structure which is used not only in the study on the micrometer scale thermal and material science research,but also in the applications such as the mass flow sensors of gas and liquid.Normaly the successful fabrication of this device is difficult. By a steped-upward chemical etch method that we have developed,we have fabricated a suspended large area (3mm X 6mm) Si 3 N 4 membrane which is mounted with NiCr/Ni thermocouples.The thickness of membrane is from lOOnm to lOOOnm. Key words LPCVD Si 3 N 4 membranes, steped-upward chemical etch method
Who reads The Fabrcation of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples?
It is typically read by researchers, students, and practitioners in Mathematics.
- Author
- Jian-Gang Zhang; Shan-Hong Xia; Shao-Feng Chen
- Publisher
- Walter de Gruyter GmbH
- Published
- 2002
- Language
- EN
- Field
- Mathematics (Physical Sciences)