About this scholarly article

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II - In-line reaction based on predictive yield-loss analysis by Recio, Miguel; Merino, Miguel A.; Garcia, Alfredo; Cruceta, Sergio; Kissinger, Gudrun; Weiland, Larg H. is a scholarly article available to read on EtoBox.

Author

Recio, Miguel; Merino, Miguel A.; Garcia, Alfredo; Cruceta, Sergio; Kissinger, Gudrun; Weiland, Larg H.

Publisher

SPIE

Published

2001