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About this Engineering article
Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface by Despiau-Pujo, Emilie; Chabert, Pascal; Ramos, Raphaël; Cunge, Gilles; Sadeghi, Nader is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Despiau-Pujo, Emilie; Chabert, Pascal; Ramos, Raphaël; Cunge, Gilles; Sadeghi, Nader
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)