About this scholarly article

2016 International Symposium on Semiconductor Manufacturing (ISSM) - STI HDP process effect on yield of embedded memory processes by Fatt, Lim Dau; Yue, Yang; Hong, Guai Guan; Chyi, Tang Pey; Kean, Goh Tat; Tao, Lin; Venkataramani, Chandrasekar; Koesun, Pak is a scholarly article available to read on EtoBox.

Author

Fatt, Lim Dau; Yue, Yang; Hong, Guai Guan; Chyi, Tang Pey; Kean, Goh Tat; Tao, Lin; Venkataramani, Chandrasekar; Koesun, Pak

Publisher

IEEE

Published

2016

Language

EN