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MEMS is the integration of mechanical elements, sensors and actuators with electronics on a silicon chip through microfabrication. It combines microelectronics with micromechanical components between 1-100 micrometers in size. MEMS originated from the development of silicon pressure sensors in the 1970s and research into using silicon as a structural material. Today MEMS are used in automotive, industrial, military and consumer applications such as accelerometers, inkjet printers, lab-on-chip devices, and m

Author

Tejes Nilankar

Language

EN