About this scholarly article

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Fabrication of Nanoporous Membranes for Knudsen Pump Using Glancing Angle Deposition by Qu, Chuang; Alphenaar, Bruce; McNamara, Shamus; Walsh, Kevin is a scholarly article available to read on EtoBox.

Author

Qu, Chuang; Alphenaar, Bruce; McNamara, Shamus; Walsh, Kevin

Publisher

IEEE

Published

2020